Polycrystalline Silicon Ingot Casting Furnace

Polycrystalline Silicon Ingot Casting Furnace is the preferred furnace for melting silicon and making silicon ingots...

Polycrystalline Silicon Ingot Casting Furnace

 

Usage     

      This Polycrystalline Silicon Ingot Casting Furnace is vertical with such functions as high vacuum, inflation and high-temperature melting directional solidification and so on. . It is the preferred furnace for melting silicon and making silicon ingots. Meanwhile ,after added with the plasma heat source , it can meet part of the purification requirements

 

Characteristics:

   1, Short production cycle of each furnace :Heating and melting can be completed within 16 hours, crystallization process 25 hours, tempering 3 hours , and cooling 12 hours .The total time is within 56 hours,

   2,low  maintenance costs.

   3, Easy replacement of thermal field,the  thermal field with up and down split is easy to replace.

   4, Safer due to a variety of protective measures, so far , it has been found that no security incidents caused by silicon leakage happened , after users’s operation.    5, High degree of automation,using  PLC + HMI (human machine interface)to achieve that one set complete the whole process.    6, Patented structure makes Larger temperature gradient from top to bottom It makes larger temperature difference from top to bottom in the thermal field to use patented ingot structure . Meanwhile ingot casting has purifying ability , even if the raw material is 4N, it can produce more than 5N polysilicon.    

 

Main technical parameters

Model	Name	Rated power	Rated temperature	Crucible volumn (liquid)	Directed solidification speed	Cold ultimate vacuum
ZT-3D	Polysilicon dual-chamber directional solidification furnace	100KW	1600°c	3KG	5-25mm/hour	6.67×10-3Pa
ZT-90D	Polysilicon directional solidification furnace	160KW	1600°c	90kg	5-25mm/hour	6.67×10-3Pa
ZT-270D	Polysilicon directional solidification furnace	185KW	1600°c	270KG	5-25mm/hour	6.67×10-1Pa
ZT-450D	Polysilicon directional solidification furnace	200KW	1600°c	450KG	5-25mm/hour	1Pa

 

Structure description 

With vertical structure , it is made of furnace body , heat sensor heating (users can choose resistance heating as the heat body) , insulation layer , directed crystallizer , moving elevating gear ,operating platform , pneumatic system , power supply with it’s control system , and vacuum system .

1, The furnace shell is under dual water-cooled head-sealed layer structure with polishing stainless steel (No.304 or No.316L material) inner layer and high-quality anti-proof carbon steel outer layer .

2, The furnace shell is equipped with rotary observation window and explosion-proof holes , with the blowing blender at the top and lifting structure , to meet the purification requirements.

3, The furnace hearth is under dual water-cooled head-sealed layer structure with polishing stainless steel (No.304 or No.316L material) inner layer and high-quality anti-proof carbon steel outer layer . The hearth and the body are connected actively , and the hearth’s lifting is controlled by hydraulic pressure.

4, The insulation layer is composed by the hard carbon felt , and is supported on the insulation layer.There is an air exit hole in the middle of upper insulation layer , and the graphite heating element is wrapped by the insulation layer beside the crucible . Users afford the quartz crucible themselves.

5, The sensor is abnormal shaped copper coil which has multi-turn circle structure , the coil connect the furnace body through insulating columns , and the coil connect the copper bars through clicking.

6, The moving lifting structure is divided into fast one and slow one to ensure the smooth lifting. The moving speed can be adjusted from 5 to 25mm per hour , and the displacement is shown by linear potentiometer(or Optical grating).

7, The vacuum system is made of amechanical pump , diffusion pump , oil diffusion pump , pneumatic valves , piping baffle and so on.

8,The temperature control loop is made of temperature controller and thermocouple , which directly control the DC voltage and power , the lifting speed is adjusted by the frequency or servo .The controller is made by Honeywell in US, or Yuguang in China , with multi-segment program-control . Displacement is instructed by digital display meter. The electric control cabinet is the Siemens standard one , and the panel is equipped with grapic simulation screen which indicates the current operation conditions of various components . The motion control is provided by a Omron PLC programmable equipment .

Polycrystalline Silicon Ingot Casting Furnace